摘要 |
PROBLEM TO BE SOLVED: To provide a chemical sensor capable of stably detecting an object to be detected in a chemical sensor.SOLUTION: The chemical sensor includes a sensitive element containing a first semiconductor region with a first channel region formed between a first drain region and a first source region, a first gate insulting film formed on the first channel region, a first gate electrode formed on the first gate insulating film, a sensitive film formed on the first gate electrode, and a controlling mechanism to control and float the potential of the first gate electrode of the sensitive element. |