发明名称 CHEMICAL SENSOR AND DETECTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a chemical sensor capable of stably detecting an object to be detected in a chemical sensor.SOLUTION: The chemical sensor includes a sensitive element containing a first semiconductor region with a first channel region formed between a first drain region and a first source region, a first gate insulting film formed on the first channel region, a first gate electrode formed on the first gate insulating film, a sensitive film formed on the first gate electrode, and a controlling mechanism to control and float the potential of the first gate electrode of the sensitive element.
申请公布号 JP2011215105(A) 申请公布日期 2011.10.27
申请号 JP20100085826 申请日期 2010.04.02
申请人 SEIKO EPSON CORP 发明人 KATO JURI
分类号 G01N27/414;H01L29/786 主分类号 G01N27/414
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