PIEZOELECTRIC MICROCANTILEVERS AND USES IN ATOMIC FORCE MICROSCOPY

摘要

The invention is direct to a piezoelectric microcantilever for static contact and dynamic noncontact atomic force microscopy which may be carried out in solution. The piezoelectric microcantilever, which includes a piezoelectric layer and a non-piezoelectric layer is capable of self actuation and detection. The piezoelectric layer may be constructed from a lead magnesium niobate-lead titanate (Pb(Mg1/3Nb2/3)O3)0.65—(PbTiO3)0.35(PMN0.65-PT0.35) (PMN-PT), zirconate titanate (PZT)/SiO2 or from any lead-free piezoelectric materials such as doped sodium-potassium niobate-lithium niobate. The piezoelectric layers of the microcantilevers may have dielectric constants of from 1600-3000 and thicknesses below 10μm. Also disclosed are methods for fabricating microcantilever sensors and methods for atomic force microscopy employing the microcantilevers.