| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for producing trichlorosilane, wherein a feed gas is heated at high heat efficiency, and further, large size thereof can be achieved without damaging heat efficiency, and mass production is made possible.SOLUTION: The apparatus for producing trichlorosilane is constituted so that an internal space of a reaction chamber 101 is partitioned in a radial direction by first walls 11A to 11E running along a circumferential direction, and partitioned into multiple spaces by second walls 12A to 12E which extend in a direction crossing the circumferential direction, and a communicating portion 28, which circulates a raw material gas to be introduced, toward a central portion of a reaction chamber 101 while the raw material gas goes through the small spaces 21 to 26 sequentially and is turned up and down, is formed at upper portions or lower portions of the first walls 11A to 11E and the second walls 12A, 12B, and heaters 40 are installed in the small spaces 21 to 26, wherein one of small spaces 21 to 25 on both sides of the second walls 12A, 12B is used as a small space for an upward flow passage, and the other is used as a small space for a downward flow passage, and the small spaces 21 to 25 communicate with each other via the communication portion 28 of the second walls 12A, 12B. |
