| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic sensor capable of superior transmission and reception of ultrasonic waves.SOLUTION: An ultrasonic sensor includes a sensor array substrate 2 having an opening 211; a support film 3 provided on the sensor array substrate 2 and closing the opening 211; a piezoelectric body disposed on the support film 3, in an inner region of the opening 211 in a plane view watching from a thickness direction of the support film 3; a first resin material 52 forming a first space S1, closed off from an outside space between the first resin part 52 and the support film 3, in at least a region in which the opening 211 is formed in the plane view, the first resin material having a contacting portion 522 facing the opening 211 and being configured to contact with fingers; a second resin part 53 for forming a second space S2 closed off from the outside space and communicating with the first space S1; and an ultrasonic-wave transmitting medium 6 filling the first and second spaces S1 and S2. A flexible portion 532, having lower rigidity than the support film 3 in the film thickness direction, is provided in at least a portion of the second resin part 53. |
