| 摘要 |
PROBLEM TO BE SOLVED: To replace a chip in a short time in a scribe device.SOLUTION: The chip 14 is rotatably attached to a chip holder 10. The chip holder 10 is formed in a cylindrical shape and the tip end has an attachment unit 16. An opening is arranged at a holder joint. The chip holder 10 is adsorbed by a magnet for attachment so that detaching and attaching can be performed easily. Chip offset data is recorded as a two-dimensional code 17 on the surface of the chip holder 10. When replacing the chip holder, the offset data is read out and inputted to a scribe device, thereby canceling the offset. As a result, the operation required for correction when attaching/detaching the chip holder is eliminated and the chip replacement is enabled during a short time of device stop. |
