| 摘要 |
PROBLEM TO BE SOLVED: To provide an extremely high vacuum hydrogen pump etc. maintaining high hydrogen exhaust velocity even if exhaust operation enters an extremely high vacuum region, hardly releasing hydrogen from a wall part of a vacuum container, and effectively exhausting hydrogen molecules from the vacuum container.SOLUTION: The extremely high vacuum hydrogen pump includes an exhaust passage container 21, at least one exhaust element 31A or 31B mounted to the exhaust passage container, and an electron gun 25 having a thermionic emission filament 26 facing the internal space of the exhaust passage container. The exhaust element includes an element container 32, an electrode structure part 50 having an asymmetric two-storied structure comprising three negative electrode plates 41-43 and two kinds of cylindrical positive electrodes 51, 52, and a permanent magnet 53 creating a magnetic field in a height direction in the two-storied structure of the electrode structure part. The exhaust element has mass getter alloy manufacturing capacity. |
