GALLIUM OXIDE POWDER

摘要

PROBLEM TO BE SOLVED: To provide new gallium oxide powder whose aggregated particles tend to be easily broken when they are pulverized in order to improve miscibility with other powders, so as to become suitable as raw materials for sputtering targets such as IGZO (InGaZnOx).SOLUTION: The product (also called "D50×SSA") of D50 by the volume standard particle size distribution (called simply "D50") as measured by a laser diffraction scattering type particle size distribution measurement method and a specific surface area (SSA) in the range of 15.0×10to 30.0×10m/g.