| 发明名称 |
WET PROCESSING OF MICROELECTRONIC SUBSTRATES WITH CONTROLLED MIXING OF FLUIDS PROXIMAL TO SUBSTRATE SURFACES |
| 摘要 |
The present invention provides methods and apparatuses for controlling the transition between first and second treatment fluids during processing of microelectronic devices using spray processor tools
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| 申请公布号 |
US2011259376(A1) |
申请公布日期 |
2011.10.27 |
| 申请号 |
US201113083948 |
申请日期 |
2011.04.11 |
| 申请人 |
WAGENER THOMAS J;BUTTERBAUGH JEFFERY W;DEKRAKER DAVID |
发明人 |
WAGENER THOMAS J.;BUTTERBAUGH JEFFERY W.;DEKRAKER DAVID |
| 分类号 |
B08B3/00 |
主分类号 |
B08B3/00 |
| 代理机构 |
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代理人 |
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