| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray source which is superior in energy efficiency and can emit X-rays stably, and can control enlargement, and a method for manufacturing the X-ray source.SOLUTION: The X-ray source 1 includes: an electron source 4; a suppression electrode 5 having a first through-hole 5h; an extraction electrode 7 which has a second through-hole 7h with a diameter of a size the same as the diameter of the first through-hole 5h or exceeding it, an acceleration electrode 11 having a third through-hole 11h, a lens electrode 13, a transmission type target 3, a shielding member 10, and a vacuum container 2. The shielding member 10 is fixed to the extraction electrode 7, formed of a material which shields electron beams, has a fourth through-hole 10h which is opposed to the second through-hole 7h and has a diameter less than the diameter of the second through-hole 7h, and narrows the passing range of the electron beams. |
