| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus constituted of a structure preventing a breakdown of an application end of an interference optical system due to a collision between a sample stage for holding a sample and an application end of the optical system when measuring an aspheric surface of a measured surface with high accuracy.SOLUTION: A sample holder mechanism A and an interference optical mechanism B are installed so as to allow relative movement severally, with the holder mechanism A for holding the sample 10 while the optical mechanism B composed of the interference optical system 2 for performing optical interference measurement by emitting measurement light. A breakdown of the optical system 2 is prevented by providing a low-strength part 64 on the sample stage 6 for holding the measured object 10 on its end in the holder mechanism A, the strength part 64 absorbing a shock in colliding with the application end 2a of the optical system 2. |
