发明名称 Transistor Constructions and Processing Methods
摘要 A transistor construction includes a first floating gate having a first conductive or semiconductive surface and a second floating gate having a second conductive or semiconductive surface. A dielectric region is circumferentially surrounded by the first surface. The region is configured to reduce capacitive coupling between the first and second surfaces. Another transistor construction includes a floating gate having a cavity extending completely through the floating gate from a first surface of the floating gate to an opposing second surface of the floating gate. The floating gate otherwise encloses the cavity, which is filled with at least one dielectric. A method includes closing an upper portion of an opening in insulator material with a gate material during the deposition before filling a lower portion with the gate material. The depositing and closing provide an enclosed cavity within the lower portion of the opening.
申请公布号 US2011260236(A1) 申请公布日期 2011.10.27
申请号 US201113178334 申请日期 2011.07.07
申请人 MICRON TECHNOLOGY, INC. 发明人 ARITOME SEIICHI
分类号 H01L29/792 主分类号 H01L29/792
代理机构 代理人
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