METHOD AND DEVICE FOR DISCRIMINATING FOREIGN MATTER CONTAMINATION IN OBJECT

摘要

PROBLEM TO BE SOLVED: To specify surely a foreign matter by selecting surely a specific component to be absent in an object which is an inspection object; to discriminate surely whether a foreign matter is contaminated in the object or not; and to thereby improve discrimination accuracy.SOLUTION: This method for discriminating whether or not a foreign matter including a specific component other than components constituting the object is contaminated in the object which is the inspection object is described as follows: a sample object having a foreign matter and a sample object not having a foreign matter are irradiated with a near-infrared ray in advance; reflected light or transmitted light from each sample object is received; a discriminant related to an attributable wavelength caused by the specific component is calculated by statistical analysis of a second derivative spectrum in an absorbance of received light; the object which is the inspection object is irradiated with the near-infrared ray; reflected light or transmitted light from the object which is the inspection object is received; the absorbance of the received light is measured; and presence/absence of a foreign matter in the object is discriminated from a calculation result calculated from the absorbance and the discriminant.