| 摘要 |
PROBLEM TO BE SOLVED: To suppress damage to a substrate when removing foreign matters deposited on the substrate.SOLUTION: A method for manufacturing an electro-optical device includes a flattening step of pressing an adhesive tape (230) having an adhesive surface to flatten the adhesive tape and a foreign matter removing step of sticking the flattened adhesive tape to a film (22) formed on a substrate (20) and then peeling the adhesive tape to remove foreign matters (300) on the film. The variation in flatness of the adhesive surface is reduced by flattening the adhesive tape, whereby variation in adhesive power of the adhesive surface can be suppressed. As a result, damage to the film due to the adhesive tape can be suppressed when foreign matters on the film formed on the substrate is removed by the adhesive tape. |
