| 摘要 |
PROBLEM TO BE SOLVED: To appropriately maintain a contact capability between a probe and an object to be inspected and improve the durability of a probe in inspecting electrical properties of the object to be inspected.SOLUTION: The probe 10 includes a beam 22 cantilever-supported on a support 21, a contact 23 mounted on a lower portion of the beam 22 and having a contact surface 24 in contact with an electrode P of a wafer, and a protrusion portion 27 for connecting the beam 22 with the contact 23. The protrusion portion 27 is extended from the free end 22b of the beam 22 to the opposite side to the fixed end 22a of the beam 22, folded back to the fixed end 22a side of the beam 22 and connected to the support 26 of the contact 23. The protrusion portion 27 is curved into a recessed portion to the fixed end 22a side of the beam 22. When the contact 23 comes into contact with the electrode P for inspection, the protrusion portion 27 rotates and deflects in an opposite direction to a deflection direction of the beam 22. |
