发明名称 PIEZOELECTRIC VIBRATION PIECE AND PIEZOELECTRIC DEVICE
摘要 A piezoelectric vibration piece includes a base made of a piezoelectric material; a plurality of vibration arms which is integrally formed with the base and extends in parallel; elongate grooves which are formed along longitudinal directions of the vibration arms; and excitation electrodes which include inner electrodes disposed in the elongate grooves and side electrodes disposed in side surfaces facing the inner electrodes, wherein widening portions in which the widths of the vibration arms are widened toward the base at a joint between the vibration arms of the base are formed, and the side electrodes are led to principal surfaces and side surfaces of the widening portions.
申请公布号 US2011260587(A1) 申请公布日期 2011.10.27
申请号 US201113178197 申请日期 2011.07.07
申请人 SEIKO EPSON CORPORATION 发明人 YAMADA YOSHIYUKI
分类号 H01L41/047 主分类号 H01L41/047
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