| 发明名称 |
RUTHENIUM-CONTAINING PRECURSORS FOR CVD AND ALD |
| 摘要 |
<p>Disclosed are ruthenium-containing precursors and methods of using the same in CVD and ALD. The disclosed precursors are metal tricarbonyl complexes having the general formula LmRu (CO) 3, wherein L is a linear or branched unsaturated hydrocarbon or a cyclic unsaturated hydrocarbon having two or more substituents; and m is 1 or 2.</p> |
| 申请公布号 |
WO2011132116(A1) |
申请公布日期 |
2011.10.27 |
| 申请号 |
WO2011IB51588 |
申请日期 |
2011.04.12 |
| 申请人 |
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE;GATINEAU, SATOKO |
发明人 |
GATINEAU, SATOKO |
| 分类号 |
C23C16/40 |
主分类号 |
C23C16/40 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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