| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate for an organic EL element capable of forming a barrier rib composed of a first barrier rib member and a second barrier rib member by the small number of processes.SOLUTION: The manufacturing method of the substrate for an organic EL element comprises a process of forming a first thin film for forming a first barrier rib member on a support substrate, a process of forming a second thin film for forming a second barrier rib member formed of a photosensitive resin on the first thin film, a process of developing a prescribed region of the second thin film after exposing it and removing the rest part except the region where the first barrier rib member is formed out of the second thin film by seeing from one of thick directions of the support substrate, a process of removing, by etching, the rest part except the region covered with the second thin film out of the first thin film and forming a first barrier rib member, and a process of forming a second barrier rib member by removing, by etching, the surface of the second thin film. |
