NANOPARTICLE GENERATOR FOR GAS DEPOSITION AND APPARATUS FOR GAS DEPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a nanoparticle generator for gas deposition, which enhances flow of a carrier gas contributing to the conveyance of nanoparticles and to provide an apparatus for gas deposition.SOLUTION: The generator includes a rectifier 12 which generates flow of a carrier gas of nanoparticles to a carrier tube 2 for nanoparticles positioned above a pot 5 in which the nanoparticles are generated.