发明名称 SPUTTERING TARGET FOR FORMING MAGNETIC RECORDING MEDIUM FILM, AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a sputtering target for forming a magnetic recording medium film where PTF can be improved, and to provide a manufacturing method thereof.SOLUTION: The sputtering target contains a composition which contains Cr and Pt, the residual portion composed of Co and inevitable impurities. The structure of the sputtering target is made to be a composite structure of a Co-Cr-Pt grain phase 4 containing Co, Cr, and Pt, and a matrix phase 3 serving as a combining phase containing Pt, Co, Cr, and the inevitable impurities. The Co concentration of the matrix phase 3 is 25 mass% or lower.
申请公布号 JP2011216135(A) 申请公布日期 2011.10.27
申请号 JP20100080586 申请日期 2010.03.31
申请人 MITSUBISHI MATERIALS CORP 发明人 WATANABE MUNEAKI;IGARASHI KAZUNORI
分类号 G11B5/851;C22C1/05;C22C19/07;C23C14/34;G11B5/64 主分类号 G11B5/851
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