| 摘要 |
PROBLEM TO BE SOLVED: To improve the linearity of a hall sensor output with respect to magnetic flux density.SOLUTION: A magnetic sensor uses a compound semiconductor thin film formed on an insulating substrate or a semi-insulating substrate 10 and having an electronic mobility distribution in a film thickness direction. The compound semiconductor thin film being a conductive layer 20 is formed by laminating a first semiconductor layer 21, a second semiconductor layer 22, and a third semiconductor layer 23 in this order. The first semiconductor layer 21 is disposed so as to contact with the insulating substrate or the semi-insulating substrate 10. The carrier mobility of the second semiconductor layer is made higher than those of the first semiconductor layer and the third semiconductor layer, and an impurity concentration of the second semiconductor layer 22 is made higher than those of the first semiconductor layer 21 and the third semiconductor layer 23. |
