| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator, or the like, that contributes to an increase in density of nozzle holes and reduction in head size.SOLUTION: The piezoelectric actuator includes a diaphragm, a piezoelectric element provided on the diaphragm, and a drive circuit formed in the diaphragm and connected electrically with the piezoelectric element. The diaphragm has a first insulating layer, a silicon layer provided on the first insulating layer, a second insulating layer provided on the silicon layer, and a third insulating layer provided on the second insulating layer. The drive circuit is formed in the silicon layer. |
