发明名称 MICROMECHANICAL COMPONENT AND A METHOD FOR OPERATING A MICROMECHANICAL COMPONENT
摘要 A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.
申请公布号 US2011261428(A1) 申请公布日期 2011.10.27
申请号 US20090998538 申请日期 2009.09.16
申请人 发明人 PINTER STEFAN;MUCHOW JOERG;FRITZ JOACHIM;FRIESE CHRISTOPH
分类号 G02B26/10;G01J1/42 主分类号 G02B26/10
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