发明名称 Device for vaporizing solid and/or liquid materials useful in a solar cell manufacturing, comprises a heat exchanger block, a heating element to heat the heat exchanger block, a meander-shaped flow channel, an inlet, and an outlet
摘要 <p>The vaporizing device comprises a heat exchanger block (1), a heating element (2) to heat the heat exchanger block, a meander-shaped flow channel, which passes through the heat exchanger block, an inlet (3) arranged into the flow channel in the peripheral region of the heat exchanger block, and an outlet (4). The single piece heat exchanger block comprises sintered block elements made from graphite. The heating elements: comprise solid heating elements such as silicon carbide, induction heaters, infrared light, and a water heater. The vaporizing device comprises a heat exchanger block (1), a heating element (2) to heat the heat exchanger block, a meander-shaped flow channel, which passes through the heat exchanger block, an inlet (3) arranged into the flow channel in the peripheral region of the heat exchanger block, and an outlet (4). The single piece heat exchanger block comprises sintered block elements made from graphite. The heating elements: comprise solid heating elements such as silicon carbide, induction heaters, infrared light, and a water heater; are located inside the heat exchanger block, outside the heat exchanger block or inside and outside of the heat exchanger block; and are independently controlled and regulated. The inlets are arranged in the flow channel in different temperature zones of the heat exchanger block. The outlets are located in the flow channel in the center and different temperature zones of the heat exchanger block. The flow channel has an inner side on which a curable coating is applied and sealed.</p>
申请公布号 DE102010016635(A1) 申请公布日期 2011.10.27
申请号 DE20101016635 申请日期 2010.04.26
申请人 CALYXO GMBH 发明人 DANNENBERG, INGO;ETZRODT, THOMAS
分类号 C23C14/26 主分类号 C23C14/26
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