| 摘要 |
<p>Provided are a film-forming method and a film-forming device for forming passivation films that can sufficiently inhibit loss due to carrier re-binding, and a solar cell element manufacturing method using same. The device is provided with a mounting part (22) for mounting the film-forming target, a high frequency power source (25), and a shower plate (23) that is provided to face the film-forming target (S) that is mounted on the mounting part (22), introduces the film-forming gas, and to which is connected the high frequency power source and to which a high frequency voltage is applied. A low frequency power source (26) is connected to the shower plate or the substrate-mounting part and applies a lower frequency voltage. The film-forming method is implemented using said film-forming device, and said film-forming method is implemented when forming passivation films.</p> |
