发明名称 |
FIBER LASER SYSTEMS FOR COLD ABLATION |
摘要 |
Scribing operations with reduced substrate heating can be provided by applying multiple optical pulses to a substrate within a time interval that is less than a material recombination time. Typically a series of pulses of durations of 5-200 ps with pulse energies of less than about 0.002 mJ can be applied at rates of about 1 MHz to about 30 MHz. Beam area and beam scanning are configured to provide substantial overlap so that material can be removed by cold ablation.
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申请公布号 |
US2011259861(A1) |
申请公布日期 |
2011.10.27 |
申请号 |
US20100942888 |
申请日期 |
2010.11.09 |
申请人 |
NLIGHT PHOTONICS CORPORATION |
发明人 |
CRIST JORDAN;FARMER JASON N.;WAARTS ROBERT G. |
分类号 |
B23K26/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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