发明名称 Microelectronic device
摘要 One embodiment of a microelectronic component system includes a base adapted for supporting a microelectronic component, a membrane sealed to the base, and a glass lid built-up on the membrane and hermetically sealing the membrane.
申请公布号 US8043880(B2) 申请公布日期 2011.10.25
申请号 US20050192701 申请日期 2005.07.28
申请人 HEWLETT-PACKARD DEVELOPMENT, L.P. 发明人 HALUZAK CHARLES C;STERNER JOHN R;SAND KIRBY
分类号 H01L21/00 主分类号 H01L21/00
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