发明名称 |
Lithographic apparatus with a fluid combining unit and related device manufacturing method |
摘要 |
A system for tuning the refractive index of immersion liquid in an immersion lithographic apparatus is disclosed. Two or more immersion liquids of different refractive index are mixed together in order to achieve a desired refractive index. Further, the fluids may be conditioned and treated to maintain optical characteristics.
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申请公布号 |
US8045135(B2) |
申请公布日期 |
2011.10.25 |
申请号 |
US20060603255 |
申请日期 |
2006.11.22 |
申请人 |
ASML NETHERLANDS B.V.;ASML HOLDING N.V. |
发明人 |
MULKENS JOHANNES CATHARINUS HUBERTUS;LIPSON MATTHEW;SEWELL HARRY;MARKOYA LOUIS JOHN |
分类号 |
G03B27/52;G03B27/42 |
主分类号 |
G03B27/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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