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发明名称
Overlayer Mark Of Semiconductor Device
摘要
<p>본 발명은 반도체 소자의 중첩 마크에 관한 것으로, 상부의 불투명 필름 층을 증착하면서 발생할 수 있는 중첩도 저하 문제를 해결하기 위하여, 종래의 오목형 및 볼록형 중첩 마크를 혼합하여 사용함으로써 중첩 마크의 왜곡을 감소시키고 중첩도를 향상시킬 수 있으므로 중첩 여유도를 높이고 안정적으로 반도체 소자를 형성할 수 있는 효과를 제공하는 기술이다.</p>
申请公布号
KR101076795(B1)
申请公布日期
2011.10.25
申请号
KR20040074269
申请日期
2004.09.16
申请人
发明人
分类号
H01L21/027;H01L23/544
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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