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发明名称
PLASMA PROCESSING METHOD AND APPARATUS
摘要
<p>진공실(900) 내의 배기를 정지함과 더불어 진공실 내에의 가스의 공급을 정지하고 진공실 내에 헬륨 가스와 디보란 가스의 혼합 가스를 봉입한 상태에서, 진공 용기 내에 플라즈마를 발생시킴과 더불어, 시료 전극에 고주파 전력을 공급함으로써, 붕소를 기판(9)의 표면 근방에 도입한다.</p>
申请公布号
KR101076516(B1)
申请公布日期
2011.10.24
申请号
KR20040071614
申请日期
2004.09.08
申请人
发明人
分类号
H01L21/265;H01L21/223
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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