可移除ＴＦＴ-ＬＣＤ制程中有色光阻的剥除组合物,申请号TW093119125-传众专利搜索

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发明名称	可移除ＴＦＴ-ＬＣＤ制程中有色光阻的剥除组合物
摘要
申请公布号	TWI350949	申请公布日期	2011.10.21
申请号	TW093119125	申请日期	2004.06.29
申请人	東進半化學股份有限公司南韓	发明人	尹锡壹南韩;金圣培南韩
分类号	G03F7/34	主分类号	G03F7/34
代理机构		代理人	蔡坤财台北市中山区松江路148号11楼;李世章台北市中山区松江路148号11楼
主权项	一种用于去除一有色光阻之剥除组合物，其至少包含：(a)1至10 wt%之一无机氢氧化硷或一氢氧化烷基铵盐；(b)40至95 wt%之二甲亚碸；以及(c)4至50 wt%之水。
地址	南韩

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