发明名称 METHOD FOR PRODUCING A DIELECTRIC LAYER ON A COMPONENT
摘要 The invention relates to a method for producing a dielectric layer on the surface of a component, by means of which a desired topography can be set. In particular, a dielectric layer having a planar surface can be generated over a substrate topography having raised structures. In a trimming process, a component property, which depends on the thickness or the third topography of the dielectric layer, is adjusted.
申请公布号 WO2011128387(A1) 申请公布日期 2011.10.20
申请号 WO2011EP55850 申请日期 2011.04.13
申请人 EPCOS AG;BINNINGER, CHARLES;EGGS, CHRISTOPH;FUERBACHER, BRUNO;KNAUER, ULRICH;MAISCH, MANFRED;ZOTTL, HELMUT 发明人 BINNINGER, CHARLES;EGGS, CHRISTOPH;FUERBACHER, BRUNO;KNAUER, ULRICH;MAISCH, MANFRED;ZOTTL, HELMUT
分类号 H03H3/10;H03H9/02 主分类号 H03H3/10
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