| 摘要 |
PROBLEM TO BE SOLVED: To balance developmental states of upstream and downstream plasmas with a simple configuration.SOLUTION: An electrode 9 (9-1, 9-2) is placed at the outside of honeycombs 4-2 and 4-3, and at the area keeping away from the extent of about 2/3 of L from an upstream end to downstream with regard to a passing direction of gas GS to be treated in the honeycombs 4-2 and 4-3. It lowers the developmental state of the plasma at the upstream side of a space 10 and suppresses moisture lost by the plasma generated at the upstream side, and thereby the developmental state of the downstream plasma is strengthened and the upstream and downstream plasmas are balanced. |
