| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of fabricating a microelectromechanical (MEM) resonator having an output frequency that may be adjusted, tuned, set, defined and/or selected whether before and/or after packaging.SOLUTION: The frequency of a MEM resonator 10 is adjusted, tuned, set, defined and/or selected by changing and/or removing material from a mechanical structure 12 of the resonator by resistively heating (in a selective or non-selective manner) one or more elements and/or beams 14a, 14b of the mechanical structure 12 (for example, movable or expandable electrodes and/or frequency adjustment structures). |
