| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for detecting and quantitatively analyzing a volatile impurity component contained in a raw material containing an organometal compound with high sensitivity without scattering the volatile impurity component.SOLUTION: The method for quantitatively analyzing impurities in the raw material containing the organometal compound quantitatively analyzes a concentration of the impurities in the raw material containing the organometal compound using a gas chromatograph and contains a decomposition process for applying decomposition treatment to the raw material and decomposing the organometal compound contained in the raw material and a measuring process for measuring the impurities in the raw material subjected to decomposition treatment by a gas chromatograph. In the decomposition process, the organometal compound is decomposed into a metal and hydrocarbon gas or hydrogen gas between the sample introducing part and a separation column in the gas chromatograph. |
