OPTICAL SEMICONDUCTOR INTEGRATED ELEMENT AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To improve reliability and performance of an optical semiconductor integrated element.SOLUTION: The optical semiconductor integrated element 1 includes a first optical semiconductor element 10 formed above a (001) face of a substrate 30 and a second optical semiconductor element 20 formed to be optically connected to the first optical semiconductor element 10 in a [110] direction of the first optical semiconductor element 10 above the (001) face of the substrate 30. The first optical semiconductor element 10 includes: a first core layer 11; and a first clad layer 12 which is formed above the first core layer 11 and has a crystal plane whose angle θ with the (001) face is ≥55° and ≤90° on a side face on the second optical semiconductor element 20 side thereof.