PIEZOELECTRIC THIN FILM, INK-JET HEAD, METHOD FOR FORMING IMAGE USING INK-JET HEAD, ANGULAR-VELOCITY SENSOR, METHOD FOR DETERMINING ANGULAR VELOCITY USING ANGULAR-VELOCITY SENSOR, PIEZOELECTRIC POWER-GENERATING ELEMENT, AND METHOD FOR GENERATING POWE

摘要

Disclosed is a piezoelectric thin film which comprises: an electrode film having (001) orientation; an (NaxBi0.5)TiO0.5x+2.75-BaTiO3 film having (001) orientation (0.29=x=0.4); and an (Na,Bi)TiO3-BaTiO3 piezoelectric layer. The electrode film, the (NaxBi0.5)TiO0.5x+2.75-BaTiO3 film, and the (Na,Bi)TiO3-BaTiO3 piezoelectric layer are laminated in said order. As a result, the piezoelectric thin film comprising a lead-free ferroelectric material has high ferroelectric characteristics and piezoelectric properties.