MEMS DEVICE AND PRODUCTION METHOD FOR SAME

摘要

Disclosed is a production method for MEMS devices, whereby it is easy to manufacture a structure in which the surface of a substrate and the bottom surface of a vibration member face one another with a sufficiently narrow gap therebetween. The MEMS device production method is a method for producing a MEMS device that comprises a vibrating section (2), which is a floating structure affixed to a substrate, and a raised facing section (5), which is separate from and faces part of the vibrating section (2) region. Said method includes: a step for preparing an SOI substrate; a step for patterning a first silicone layer, forming an outer frame section and the raised facing section (5), and forming through-holes (18) in the raised and facing section (5); a step for creating a state of separation between the raised facing section (5) and a second silicone layer by etching away part of an intermediate insulating layer; a step for collectively adhering substrates so as to cover the outer frame and the raised facing section; and a step for forming a vibrating section (2) by patterning the second silicone layer and then further isolating the raised facing section.