EMISSION METHOD TO MONITOR SPEED OF DEPOSITION AND COMPOSITION OF COATINGS APPLIED IN VACUUM

摘要

FIELD: instrument making. ^ SUBSTANCE: in the method they register emission spectra of atoms in steam flow passing between the anode and the cathode and crossing flow of low-energy electrons. The electronic beam is placed into the magnetic field, and emission lines are registered by means of a charged coupled device. ^ EFFECT: increased intensity of steam flow emission lines without increase of cathode filament current, emission current and energy of exciting electrons, as a result level of emission lines intensity to level of noise caused by cathode thread radiation increases. ^ 2 dwg