| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal fluoride crystal that emits light with high brightness in a vacuum ultraviolet region and is suitably used for photolithography, cleaning and sterilization of substrates of a semiconductor and liquid crystal, a next-generation mass optical disk, medical treatment (ophtalmology treatment, DNA incision) and the like, and to provide a vacuum ultraviolet light emitting element.SOLUTION: The metal fluoride crystal is represented by the chemical formula: BaCaMF, wherein M indicates Y, Lu or La, the metal fluoride crystal containing at least one element selected from the group consisting of Nd, Er, Tm and Yb. The vacuum ultraviolet light emitting element is made of the metal fluoride crystal. |
