发明名称 Quantum efficiency measurement system and methods of use
摘要 A system for measuring a characteristic of a solar cell is disclosed and includes a light source irradiating an optical signal having a spectral range from about 100nm to about 3000nm, a wavelength selector configured to selectively narrow the spectral range of the optical signal, a beam splitter, a reference detector in optical communication with the beam splitter and configured to measure a characteristic of the optical signal, a specimen irradiated with the optical signal, a reflectance detector in optical communication with the specimen via the beam splitter and configured to measure an optical characteristic of the optical signal reflected by the specimen, a multiplexer in communication with at least one of the reference detector, specimen, and reflectance detector, and a processor in communication with at least one of the reference detector, specimen, and reflectance detector via the multiplexer and configured to calculate at least one characteristic of the specimen.
申请公布号 AU2010249578(A1) 申请公布日期 2011.10.20
申请号 AU20100249578 申请日期 2010.05.19
申请人 NEWPORT CORPORATION 发明人 CIOCAN, RAZVAN;DONOHUE, JOHN;FELDMAN, ARKADY;LI, ZHUOYUN
分类号 H01L21/66;H01L31/042;H01L31/18 主分类号 H01L21/66
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