发明名称 SYSTEMS AND METHODS FOR COOLING AN OPTIC
摘要 Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.
申请公布号 US2011253349(A1) 申请公布日期 2011.10.20
申请号 US20100900762 申请日期 2010.10.08
申请人 CYMER, INC. 发明人 ERSHOV ALEXANDER I.;MORSE ROBERT L.;PARTLO WILLIAM N.;PATE CHRISTOPHER P.
分类号 F28F13/12 主分类号 F28F13/12
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