| 摘要 |
PROBLEM TO BE SOLVED: To provide a CMP ring in which a crystallization distortion of a molded component is further suppressed, compared with a conventional thermoplastic polyester, the molded component has less volatilization constitution, and thereby contamination of a silicon wafer, due to the volatilization constitution, is suppressed.SOLUTION: The CMP ring consists of polyester carbonate composition in which aromatic polyester contains polycarbonate diol, and the CMP ring is characterized in that: the D hardness of the surface of the polyester carbonate composition is 75 or more; and the polyester carbonate composition contains 5 to 10 wt.% of polycarbonate diol. Preferably, an outgassing amount generated from the polyester is 20 μg/g or less. |
