| 摘要 |
PROBLEM TO BE SOLVED: To confirm a tip structure of an emitter without introducing a system for FIM image acquisition.SOLUTION: A focused ion beam device which supplies gas to a chip 1, impresses voltage on an extraction electrode 4, and emits an ion beam 11 from the chip 1, is provided with a current measurement portion 111 varying voltage and measuring current volume of the ion beam 11, and a processing unit 114 performing comparison process between measurement data measured at the current measurement portion 111 and standard data. Thus the focused ion beam device inspects a chip tip structure. |
