| 摘要 |
PROBLEM TO BE SOLVED: To perform the patterning of a laminated substrate such as a solar battery substrate with high speed and high precision without increasing the cost.SOLUTION: A patterning device includes a pair of supporting parts 1 disposed at a predetermined interval, a guide bar 2, a processing head 3, a roller stage 4 and a conveying mechanism 5. The guide bar 2 is disposed between the pair of supporting parts 1 and supported at both ends by the pair of supporting parts 1, and a laminated substrate can pass underneath the guide bar. The processing head 3 is mounted on the guide bar 2 and is used for patterning a thin film layer. The roller stage 4 is disposed to face the processing head 3 between the pair of supporting parts 1 and is freely rotatably supported by the pair of supporting parts 1, and the laminated substrate is placed on the external peripheral surface. The conveying mechanism 5 conveys the laminated substrate placed on the roller stage 4. |
