| 摘要 |
PROBLEM TO BE SOLVED: To use appropriate ion species in accordance with applications by easily carrying out changeover of ion species of ion sources.SOLUTION: The focused ion beam device includes a storage part 302 storing a set temperature of a chip, gas pressure of ion-source gas, extraction voltage impressed on an extraction electrode, a set value of contrast, and a set value of brightness, an input part 106 selecting and inputting gas species, and a control part 301 reading out the set temperature corresponding to the gas species input, gas pressure, extraction voltage, the set value of contrast, and the set value of brightness from the storage part 302 and setting a heater part 1b, a gas control part 104, a voltage control part 27 and an adjustment part 303 of observation images, respectively. |
