METHOD FOR MANUFACTURING NANO IMPRINT MOLD, METHOD FOR MANUFACTURING PATTERN-FORMED BODY, AND NANO IMPRINT MOLD

摘要

PROBLEM TO BE SOLVED: To mainly obtain a nano imprint mold showing good fillability of a resin in a recess of a pattern and mold releasability.SOLUTION: The method for manufacturing the nano imprint mold has: a first mold release layer-forming process of preparing a mold member including a pattern with a protrusion and a recess and a metallic film formed on the top of the protrusion, and forming the first mold release layer on the side wall and bottom of the recess and on the surface of the metallic film using the first mold release agent; a metallic film-peeling process of peeling the metallic film having the first mold release layer on the surface; and a second mold release layer-forming process of forming the second mold release layer having higher liquid repellency than the first mold release layer on the top of the protrusion exposed by peeling the metallic film using the second mold release agent.