DEPOSITION APPARATUS AND DEPOSITION METHOD

摘要

Disclosed is a deposition apparatus (50) which forms, in a predetermined pattern, a thin film (3) on a substrate (10) for an organic EL display. A first correction plate (81) and a second correction plate (82) are disposed between a shadow mask (60) and a deposition source (53) that radiates deposition particles. The correction plates (81, 82) respectively have a plurality of blade plates (83) and frames (84) that support the blade plates. When viewed from the direction that orthogonally intersects the shadow mask (60), the blade plates (83) are disposed such that the blade plates extend parallel to each other with openings (86) between the adjacent blade plates (83), in a state wherein the blade plates are tilted with respect to the shadow mask (60).