发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT AND METHOD OF FABRICATING SAME
摘要 A semiconductor integrated circuit comprising thin-film transistors in each of which the second wiring is prevented from breaking at steps. A silicon nitride film is formed on gate electrodes and on gate wiring extending from the gate electrodes. Substantially triangular regions are formed out of an insulator over side surfaces of the gate electrodes and of the gate wiring. The presence of these substantially triangular side walls make milder the steps at which the second wiring goes over the gate wiring. This suppresses breakage of the second wiring.
申请公布号 US2011254089(A1) 申请公布日期 2011.10.20
申请号 US201113169518 申请日期 2011.06.27
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 SUZAWA HIDEOMI;TAKEMURA YASUHIKO
分类号 H01L27/092;H01L29/78;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786 主分类号 H01L27/092
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