SEMICONDUCTOR SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR SUBSTRATE, AND ELECTROMAGNETIC WAVE GENERATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor substrate that outputs a plurality of different frequencies.SOLUTION: The semiconductor substrate comprises a first impurity semiconductor including a p-type semiconductor or n-type semiconductor, and a depleted semiconductor having a plurality of depleted regions in contact with the first impurity semiconductor, wherein the plurality of depleted regions each have a first interface with the first impurity semiconductor and a surface opposed to the first interface, and the plurality of depleted regions differ in at least one of an average distance between a first interface and a surface in a direction perpendicular to the first interface and a composition.