发明名称 Chemical Composition and Methods for Removing Epoxy-Based Photoimageable Coatings Utilized In Microelectronic Fabrication
摘要 The present invention is a chemical composition to remove epoxy-based photoimageable coatings that include a solvent system to dissolve and rinse away the coating, an acidic additive that hydrolyzes the coating and releases a plurality of monomeric forms to the solvent, a plurality of inhibitors that protect any exposed substrate and a surfactant to lower a surface tension of the coating on the substrate. The composition can be utilized with a method for removing a partial cured and a fully cured epoxy-based photoimageable coating from a substrate with the composition to remove epoxy-based photoimageable coatings.
申请公布号 US2011253171(A1) 申请公布日期 2011.10.20
申请号 US201113087571 申请日期 2011.04.15
申请人 MOORE JOHN 发明人 MOORE JOHN
分类号 B08B3/00;C11D7/60 主分类号 B08B3/00
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